Anti-stiction coatings for MEMS devices - Document - Gale Academic OneFile
Vapor Phase Anti-Stiction Monolayer Coatings for MEMS
![Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]](https://uspto.report/patent/grant/10513432/US10513432-20191224-D00000.png "Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]")
Anti-stiction process for MEMS device Patent Grant Weng , et al. Dec [Taiwan Semiconductor Manufacturing Co., Ltd.]
Aging of self-assembled monolayers for anti-stiction coatings studied by near edge x-ray absorption fine structure
Mems stiction and anti stiction
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments - ScienceDirect
MVD Anti-stiction Coating for MEMS | SPTS
PDF) Anti-stiction coatings for MEMS devices
![PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/c3412405e6de48d2acb34eaac695f7cfe355f37c/2-Figure2-1.png "PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar")
PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar
![PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/258e2b43c99abee6e5c9796e40992d278cb3e482/2-Table1-1.png "PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar")
PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar
PDF) Vapor phase anti-stiction coatings for MEMS
Figure 2 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
PDF) Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
![PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/258e2b43c99abee6e5c9796e40992d278cb3e482/2-Figure1-1.png "PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar")
PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar
Mems stiction and anti stiction
![Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]](https://uspto.report/patent/grant/10759654/US10759654-20200901-D00001.png "Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]")
Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]
Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
MVD® Anti-stiction Coating for MEMS
An improved vapor-phase deposition technique for anti-stiction monolayers
PDF) Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS | Wolfgang Benecke and Thomas Knieling - Academia.edu
Figure 4 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
![PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/c3412405e6de48d2acb34eaac695f7cfe355f37c/2-Figure1-1.png "PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar")
PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar
