Tunable Antireflection Coating to Remove Index‐Matching Requirement for Interference Lithography
AR™ Fast Etch Organic Bottom Anti-Reflectant Coatings
Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC–resist interface - ScienceDirect
Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering - Nanoscale (RSC Publishing) DOI:10.1039/C9NR02215E
Anti-Reflective Coatings - ppt download
BARC - "Bottom Anti Reflective Coating" by AcronymsAndSlang.com
Reflective Multilayer Materials
Understanding deviations in lithographic patterns near interfaces: Characterization of bottom anti-reflective coatings (BARC) and the BARC–resist interface - ScienceDirect
Top Anti-reflective Coatings vs Bottom Anti-reflective Coatings - Brewer Science
유망산업] 글로벌 반도체 반사방지막(Anti-reflective Coating : BARC, TARC) 시장조사 보고서 - QYResearch(QY리서치) : 네이버 블로그